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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Microfluidics, BioMEMS, and Medical Microsystems VIII - Tuning parameters of metal ion implantation within a microfluidic channel

Choi, Jae-Woo, Becker, Holger, Wang, Wanjun, Rosset, Samuel, Niklaus, Muhamed, Adleman, James R., Shea, Herbert, Psaltis, Demetri
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Volume:
7593
Year:
2010
Language:
english
DOI:
10.1117/12.842025
File:
PDF, 523 KB
english, 2010
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