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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] MOEMS and Miniaturized Systems IX - Prototyping of MWIR MEMS-based optical filter combined with HgCdTe detector
Kozak, Dmitry A., Schenk, Harald, Piyawattanametha, Wibool, Fernandez, Bautista, Velicu, Silviu, Kubby, JoelVolume:
7594
Year:
2010
Language:
english
DOI:
10.1117/12.842700
File:
PDF, 3.02 MB
english, 2010