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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - Characterization of filter performance on contact-hole defectivity
Braggin, J., Allen, Robert D., Somervell, Mark H., Vitorino, N., Monreal, V., Zook, J.Volume:
7972
Year:
2011
Language:
english
DOI:
10.1117/12.879457
File:
PDF, 3.63 MB
english, 2011