SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco,...

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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] MOEMS and Miniaturized Systems XI - One dimensional light modulator

Sinning, S., Schenk, Harald, Piyawattanametha, Wibool, Wullinger, I., Schmidt, J.-U., Noell, Wilfried, Friedrichs, M., Dauderstädt, U., Wolschke, S., Hughes, T., Pahner, D., Wagner, M.
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Volume:
8252
Year:
2012
Language:
english
DOI:
10.1117/12.906651
File:
PDF, 629 KB
english, 2012
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