Low-pressure sustainment of surface-wave microwave plasma...

Japanese Journal of Applied Physics 2016 / 01 Vol. 55; Iss. 1

Low-pressure sustainment of surface-wave microwave plasma with modified microwave coupler

Sasai, Kensuke, Suzuki, Haruka, Toyoda, Hirotaka
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.016203
Date:
January, 2016
File:
PDF, 1.12 MB
english, 2016
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