B13-O-03A high sensitivity and high responsivity pin diode...

Microscopy 2015 / 11 Vol. 64; Iss. suppl 1

B13-O-03A high sensitivity and high responsivity pin diode detector design for a backscattering electron detection of SEM

Chien, Yi-Hsiang, Chuang, Yun-Ju, Lee, Chih-Hao, Chen, Fu-Rong
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Volume:
64
Language:
english
Journal:
Microscopy
DOI:
10.1093/jmicro/dfv115
Date:
November, 2015
File:
PDF, 700 KB
english, 2015
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