[IEEE 2015 International Conference on Optoelectronics and Microelectronics (ICOM) - Changchun, China (2015.7.16-2015.7.18)] 2015 International Conference on Optoelectronics and Microelectronics (ICOM) - Fabrication of metal grating by holographic lithography system
Zhuang, Yunyi, Ye, Zhen, Gao, Zhanqi, Zhang, Siyuan, Hao, Yongqin, Feng, Yuan, Li, Zaijin, Wang, Yong, Zhenfu, MaYear:
2015
Language:
english
DOI:
10.1109/icoom.2015.7398838
File:
PDF, 395 KB
english, 2015