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[IEEE 5th International Conference on Properties and Applications of Dielectric Materials - Seoul, South Korea (25-30 May 1997)] Proceedings of 5th International Conference on Properties and Applications of Dielectric Materials - Plasma properties of YBaCuO oxide films by rf facing targets magnetron sputtering
Chung-Seog Choi,, Ebihara, K., Bok-Kee Park,, Nak-Jin Seong,, Kyung-Sup Lee,, Duck-Chool Lee,Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/icpadm.1997.617669
File:
PDF, 236 KB
english, 1997