[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Elastomers for control of wafer temperature in the ≈50°C range during high dose ion implantation
Springer, Jeff, Wriggins, Walt, Kusterer, Juergen, Zotter, Karl, Current, Michael I.Year:
2014
Language:
english
DOI:
10.1109/iit.2014.6939983
File:
PDF, 929 KB
english, 2014