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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - High throughput ion implanter for environmentally beneficial products with III–V compound semiconductor
Matsumoto, Takeshi, Onoda, Masatoshi, Orihira, Kohich, Tatemichi, Junichi, Guiot, Eric, Petit, Olivier, Courrenq, ThibautYear:
2014
Language:
english
DOI:
10.1109/iit.2014.6940024
File:
PDF, 582 KB
english, 2014