[IEEE 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Hsinchu (2015.6.29-2015.7.2)] 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits - Impact of fluorine on Idsat of field-effect transistor
Lei Zhu,, Ong, Kenny, Mo, Z. Q., Zhao, S. P., Lam, JeffreyYear:
2015
Language:
english
DOI:
10.1109/ipfa.2015.7224401
File:
PDF, 283 KB
english, 2015