[IEEE 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - Aracaju, Brazil (2014.9.1-2014.9.5)] 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - Study of gate contact over active area
Carmona, M., Hubert, Q., Lopez, L., Julien, F., Ogier, J.-L., Goguenheim, D., Beauvisage, L.Year:
2014
Language:
english
DOI:
10.1109/sbmicro.2014.6940082
File:
PDF, 1.59 MB
english, 2014