[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Micro force sensor with piezoresistive amorphous carbon strain gauge
Peiner, E., Tibrewala, A., Bandort, R., Biehl, S., Luthje, H., Doering, L.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1496476
File:
PDF, 672 KB
english, 2005