Influence of Glass-Frit Material Distribution on the...

IEEE Transactions on Components Packaging and Manufacturing Technology 2015 / 11 Vol. 5; Iss. 11

Influence of Glass-Frit Material Distribution on the Performance of Precision Piezoresistive MEMS Pressure Sensors

Sandvand, Asmund, Halvorsen, Einar, Aasmundtveit, Knut E., Jakobsen, Henrik
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Volume:
5
Language:
english
Journal:
IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI:
10.1109/tcpmt.2015.2486018
Date:
November, 2015
File:
PDF, 2.72 MB
english, 2015
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