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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - μGC × μGC microsystem with resistive and optical detection
Collin, W.R., Scholten, K.W., Paul, D., Kurabayashi, K., Fan, X., Zellers, E.T.Year:
2015
Language:
english
DOI:
10.1109/transducers.2015.7181081
File:
PDF, 806 KB
english, 2015