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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - A study of vertical lithography for high-density 3D structures
Mizutani, Masaki, Conley, Will, Hirai, Shin-Ichiro, Koizumi, Ichiro, Mori, Ken-Ichiro, Miura, SeiyaVolume:
8683
Year:
2013
Language:
english
DOI:
10.1117/12.2011340
File:
PDF, 756 KB
english, 2013