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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Matching of beams on the MAPPER MATRIX tool: a simulation study
Belledent, J., Tong, William M., Resnick, Douglas J., Berglund, G. Z. M., Brandt, P. L., Bérard-Bergery, S., Wieland, M. J., Pain, L.Volume:
8680
Year:
2013
Language:
english
DOI:
10.1117/12.2011500
File:
PDF, 913 KB
english, 2013