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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Micromachining and Microfabrication Process Technology XIX - Residual stress control during the growth and release process in gold suspended microstructures
Maher, Mary Ann, Resnick, Paul J., Sharma, Akshdeep, Bansal, Deepak, Kumar, Amit, Kumar, Dinesh, Rangra, KamaljitVolume:
8973
Year:
2014
Language:
english
DOI:
10.1117/12.2041433
File:
PDF, 2.45 MB
english, 2014