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SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York, United States (Monday 12 October 2015)] Optifab 2015 - Homodyne displacement measuring interferometer probe for optical coordinate measuring machine with tip and tilt sensitivity
Bentley, Julie L., Stoebenau, Sebastian, Butler, Sam C., Ricci, Michael A., Wang, Chen, Wei, Qun, Ellis, Jonathan D.Volume:
9633
Year:
2015
Language:
english
DOI:
10.1117/12.2195966
File:
PDF, 741 KB
english, 2015