SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] MOEMS and Miniaturized Systems XV - A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy
Piyawattanametha, Wibool, Park, Yong-Hwa, Xu, Song, Huang, Chih-Hsien, Zou, JunVolume:
9760
Year:
2016
Language:
english
DOI:
10.1117/12.2211752
File:
PDF, 582 KB
english, 2016