SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX, United States (Wednesday 25 October 1995)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis - Correlation between space charge created by Fowler-Nordheim electron injections and charge to breakdown (Q BD ) of gate oxides in MOS capacitors: modeling and experiment
Oualid, J., Ciantar, E., Moragues, J. M., Sagnes, Bruno, Boivin, Philippe, Blaise, G.Volume:
2635
Year:
1995
Language:
english
DOI:
10.1117/12.221437
File:
PDF, 565 KB
english, 1995