SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX, United States (Wednesday 25 October 1995)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis - Prevention of auto-doping-induced threshold voltage shifts
Phan, Tony T., Healey, Jerry T., Kent, William R.Volume:
2635
Year:
1995
Language:
english
DOI:
10.1117/12.221444
File:
PDF, 160 KB
english, 1995