SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III - Low-cost optical microstructures fabricated by imprinting porous silicon
Ryckman, Judson D., Schoenfeld, Winston V., Wang, Jian J., Liscidini, Marco, Sipe, J. E., Loncar, Marko, Suleski, Thomas J., Weiss, S. M.Volume:
7591
Year:
2010
Language:
english
DOI:
10.1117/12.842898
File:
PDF, 1.31 MB
english, 2010