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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] MOEMS and Miniaturized Systems IX - Nonlinear mathematical model for a biaxial MOEMS scanning mirror
Ma, Yunfei, Schenk, Harald, Piyawattanametha, Wibool, Davis, Wyatt O., Ellis, Matt, Brown, DeanVolume:
7594
Year:
2010
Language:
english
DOI:
10.1117/12.843084
File:
PDF, 2.49 MB
english, 2010