SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - Bound PAG resists: an EUV and electron beam lithography performance comparison of fluoropolymers

Bozano, Luisa D., Allen, Robert D., Somervell, Mark H., Brock, Phillip J., Truong, Hoa D., Sanchez, Martha I., Wallraff, Gregory M., Hinsberg, William D., Allen, Robert D., Fujiwara, Masaki, Maeda, Ka
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
7972
Year:
2011
Language:
english
DOI:
10.1117/12.884519
File:
PDF, 3.11 MB
english, 2011
Conversion to is in progress
Conversion to is failed