Radio-Frequency Sputtering Growth of Indium Nitride Thin...

Materials Science Forum 2016 / 3 Vol. 846

Radio-Frequency Sputtering Growth of Indium Nitride Thin Film on Flexible Substrate

Lee, Zhi Yin, binti Osman, Siti Aisyah, Fong, Chee Yong, Ng, Sha Shiong
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Volume:
846
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.846.650
Date:
March, 2016
File:
PDF, 609 KB
english, 2016
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