Quality control of JEOL JBX-9500FSZ e-beam lithography...

Microelectronic Engineering 2016 / 04 Vol. 155

Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory

Greibe, Tine, Anhøj, Thomas Aarøe, Johansen, Leif Steen, Han, Anpan
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Volume:
155
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.02.003
Date:
April, 2016
File:
PDF, 632 KB
english, 2016
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