Fabrication of piezoelectric multilayer thin-film actuators

Microsystem Technologies 2016 / 6 Vol. 22; Iss. 6

Fabrication of piezoelectric multilayer thin-film actuators

Kurokawa, Fumiya, Kishimoto, Masaya, Tsujiura, Yuichi, Hida, Hirotaka, Kanno, Isaku
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2860-0
Date:
June, 2016
File:
PDF, 1.68 MB
english, 2016
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