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[IEEE 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Montpellier, France (2015.4.27-2015.4.30)] 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring
Berthelot, Brice, Algre, Emmanuelle, Moularat, Stephane, Robine, Enric, Gehin, EvelyneYear:
2015
Language:
english
DOI:
10.1109/dtip.2015.7161009
File:
PDF, 743 KB
english, 2015