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[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - The effect of fluid pH for 2-body lapping process
Kim, Hyuk-Min, Park, Jin-Goo, Seo, Young-GilYear:
2014
Language:
english
DOI:
10.1109/icpt.2014.7017309
File:
PDF, 121 KB
english, 2014