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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Formation of oxide thin films for optical applications by O/sub 2/-cluster ion beam assisted deposition
Katsumata, H., Matsuo, J., Nishihara, T., Tachibana, T., Minami, E., Yamada, K., Adachi, M., Yamada, I.Volume:
2
Year:
1998
Language:
english
DOI:
10.1109/iit.1998.813898
File:
PDF, 446 KB
english, 1998