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[IEEE 2015 IEEE 13th International Scientific Conference on Informatics - Poprad, Slovakia (2015.11.18-2015.11.20)] 2015 IEEE 13th International Scientific Conference on Informatics - Decoupling of two-axis electrostatically-actuated 3D MEMS mirror
Plander, Ivan, Stepanovsky, MichalYear:
2015
Language:
english
DOI:
10.1109/informatics.2015.7377834
File:
PDF, 987 KB
english, 2015