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[IEEE 2011 International Symposium on Electrical Insulating Materials (ISEIM) - Kyoto (2011.9.6-2011.9.10)] Proceedings of 2011 International Symposium on Electrical Insulating Materials - Evaluation of phthalocyanine film deposition using hybrid sensor of quartz crystal microbalance and optical waveguide spectroscopy
Uno, Akihiro, Shinbo, Kazunari, Ishikawa, Hiroshi, Ohdaira, Yasuo, Baba, Akira, Kato, Keizo, Kaneko, FutaoYear:
2011
Language:
english
DOI:
10.1109/iseim.2011.6826311
File:
PDF, 252 KB
english, 2011