Postfabrication Trimming of CMOS-Compatible Athermal MZI by...

Postfabrication Trimming of CMOS-Compatible Athermal MZI by Thermal Annealing

Lee, Jong-Moo, Kim, Min-su, Fournier, Maryse, Labeye, Pierre, Oton, Claudio J., Testa, Francesco
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Volume:
34
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/jlt.2016.2515102
Date:
February, 2016
File:
PDF, 495 KB
english, 2016
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