Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators
Cassella, Cristian, Singh, Navab, Soon, Bo Woon, Piazza, GianlucaVolume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2423663
Date:
October, 2015
File:
PDF, 1.02 MB
english, 2015