[IEEE 43rd IEEE Midwest Symposium on Circuits and Systems - Lansing, MI, USA (8-11 Aug. 2000)] Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144) - Integration of micromachined devices and microelectronic circuits: techniques and challenges
Tadigadapa, S.Volume:
1
Year:
2000
Language:
english
DOI:
10.1109/mwscas.2000.951625
File:
PDF, 685 KB
english, 2000