[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Fabrication and characterization of stop flow valves for fluid handling

Egidi, G., Herrera, F., Moreno-Bondi, M.C., Kempe, M., Van Rhijn, J.A., Fiaccabrino, G.C., de Rooij, N.F.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1215274

File:

PDF, 291 KB

english, 2003

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