Atomic layer deposited second-order nonlinear optical...

Optics Letters 2015 / 11 Vol. 40; Iss. 22

Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

Clemmen, Stéphane, Hermans, Artur, Solano, Eduardo, Dendooven, Jolien, Koskinen, Kalle, Kauranen, Martti, Brainis, Edouard, Detavernier, Christophe, Baets, Roel
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Volume:
40
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.40.005371
Date:
November, 2015
File:
PDF, 1.37 MB
english, 2015
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