[IEEE 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475) - Maui, Hawaii, USA (Dec. 9-12, 2003)] 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475) - Neural network based uniformity profile control of linear chemical-mechanical planarization
Jingang Yi,, Ye Sheng,, C. Shan Xu,Volume:
6
Year:
2003
Language:
english
DOI:
10.1109/cdc.2003.1271963
File:
PDF, 445 KB
english, 2003