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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - The sub-micron fabrication technology
Liu Ming,, Chen Bao-qin,, Ye Tian-chun,, Qian He,, Xu Qiuxia,Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/icsict.2001.981515
File:
PDF, 301 KB
english, 2001