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[IEEE 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Grenoble, France (2015.5.18-2015.5.21)] 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Experimental investigations on a plasma assisted in situ restoration process for sidewall damaged ultra low-k dielectrics
Kohler, Nicole, Fischer, Tobias, Zimmermann, Sven, Schulz, Stefan E.Year:
2015
DOI:
10.1109/iitc-mam.2015.7325598
File:
PDF, 294 KB
2015