[IEEE 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Grenoble, France (2015.5.18-2015.5.21)] 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - TC degradation and root-cause analysis of SACVD BPSG film for robust IC fabrication
Park, Jongwoo, Lee, Miji, Kang, Han Byul, Lee, Dong Keun, Kim, Jung Dong, Pae, SangwooYear:
2015
Language:
english
DOI:
10.1109/iitc-mam.2015.7325662
File:
PDF, 514 KB
english, 2015