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Impacts of Tapered Sidewall Profiles With High Aspect Ratio on Subwavelength Grating Structure
Yu, Wenxi X., Yi, Y.Volume:
27
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/lpt.2015.2424596
Date:
July, 2015
File:
PDF, 1.41 MB
english, 2015