[IEEE IEEE Micro Electro Mechanical Systems. 1995 -...

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[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - An electrochemical micro actuator

Hamberg, M.W., Neagu, C., Gardeniers, J.G.E., Ijntema, D.J., Elwenspoek, M.
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Year:
1995
Language:
english
DOI:
10.1109/memsys.1995.472545
File:
PDF, 446 KB
english, 1995
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