[IEEE Application of the Conversion Research Results for International Cooperation. SIBCONVERS'99. Third International Symposium - Tomsk, Russia (18-20 May 1999)] Application of the Conversion Research Results for International Cooperation. SIBCONVERS'99. Third International Symposium. Proceedings (Cat. No.99EX246) - Investigation of a gas thermal desorption mechanism in the course of film sputtering for optical waveguides
Orlikov, L.N., Orlikov, N.L., Shandarov, S.M.Year:
1999
Language:
english
DOI:
10.1109/sibcon.1999.771750
File:
PDF, 263 KB
english, 1999