[IEEE 2015 21st International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Paris, France (2015.9.30-2015.10.2)] 2015 21st International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Thermal conductivity of polycrystalline aluminum nitride films: Effects of the microstructure, interfacial thermal resistance and local oxidation

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