Effects of Thermal Drifts on the Calibration of Capacitive...

IEEE Transactions on Instrumentation and Measurement 2015 / 11 Vol. 64; Iss. 11

Effects of Thermal Drifts on the Calibration of Capacitive Displacement Probes at the Nanometer Level of Accuracy

Bouderbala, Kamelia, Nouira, Hichem, Girault, Manuel, Videcoq, Etienne, Salgado, Jose Antonio
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Volume:
64
Language:
english
Journal:
IEEE Transactions on Instrumentation and Measurement
DOI:
10.1109/tim.2015.2440563
Date:
November, 2015
File:
PDF, 7.23 MB
english, 2015
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