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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] MOEMS and Miniaturized Systems XV - Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters
Piyawattanametha, Wibool, Park, Yong-Hwa, Othman, Muhammad A., Sabry, Yasser M., Sadek, Mohamed, Nassar, Ismail M., Khalil, Diaa A.Volume:
9760
Year:
2016
Language:
english
DOI:
10.1117/12.2211323
File:
PDF, 335 KB
english, 2016