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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process
Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Ehrhardt, M., Lorenz, P., Bayer, L., Molpeceres, C., Ramirez, C. Antonio Herrera, Zimmer, K.Volume:
9735
Year:
2016
Language:
english
DOI:
10.1117/12.2212495
File:
PDF, 969 KB
english, 2016