Improvement of plasma etching durability of positive...

Improvement of plasma etching durability of positive working resist by copolymerization, blending, and crosslinking

Nobuo Ueno, Yasunori Doi, Kazuyuki Sugita, Shigeru Sasaki, Shiro Nagata
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Volume:
34
Year:
1987
Language:
english
Pages:
15
DOI:
10.1002/app.1987.070340426
File:
PDF, 728 KB
english, 1987
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