Improvement of plasma etching durability of positive working resist by copolymerization, blending, and crosslinking
Nobuo Ueno, Yasunori Doi, Kazuyuki Sugita, Shigeru Sasaki, Shiro NagataVolume:
34
Year:
1987
Language:
english
Pages:
15
DOI:
10.1002/app.1987.070340426
File:
PDF, 728 KB
english, 1987